欧美男女啪啪-欧美男女视频-欧美男女性生活视频-欧美男人天堂网-欧美嫩草-欧美你懂得

Automatic Direct Plasma Cleaning System RPD-5
  • Automatic Direct Plasma Cleaning System RPD-5

Automatic Direct Plasma Cleaning System RPD-5

ApplicationsThe system is perfectly used for cleaning and surface activation prior to semiconductor packaging process such as

Applications

The system is perfectly used for cleaning and surface activation prior to semiconductor packaging process such as die bonding, wire bonding, underfill, molding, etc., capable to effectively remove the surface contaminants of organics and oxides from the packaging materials, excellently enhancing the bonding strength and adhesion performance, thus significantly improving the process yield. With automatic substrates or lead frames loading and unloading assembly, the system is featured with fast cleaning cycle and high cleaning uniformity, particularly suitable for highly demanding production where very high performance of cleaning results is mandatory.


Features

Enhanced surface treatment for all products. 

Consistent high-uniformity cleaning for all position of products 

Multiple operation and display for all process steps 

Automatic 4 lanes transferring with loading/unloading (max 6 lanes)

Automatic quick conversion of lane width for product changeover

High throughput productivity (450 strips/h for 5 lanes)

Unique air cooling design in chamber bottom 

Touch screen IPC & PLC based control system 


Specifications

Plasma Frequency

13.56MHz (radio frequency)

Plasma Power

Standard 600W, (optional 1000W)

Generator Cooling

Air cooling at chamber bottom

Product Size

Length: Max. 260mm

Width: 30-60mm(5 lanes); 30-80mm (4 lanes), over 80mm (1-3 lanes)

Thickness: Max.1mm

Lanes

Standard 4 lanes (Max 6 lanes)

Lane Width

30-60mm(5 lanes), 30-80mm (4 lanes), over 80mm (1-3 lanes), automatic quick conversion

SPH

450 strips (for 5 lanes)

Chamber Size (internal)

W280mm x D440mm x H55mm

Mass Flow Controllers

Standard 1 ( up to 2), flow rate 100sccm each

Vacuum Gauge

Pirani or capacitance manometer

Vacuum Pump

Dry pump, built-in type, 1000L/Min@50Hz

Control System

Windows based touchscreen IPC + PLC control, supporting manual and automatic operation, process recipe program editing/storage/execution, and automatic process data recording and display. Supports MES system.

Enclosure Dimension

W1080mm x D1800mm x H1500mm (tower lamp excluded)

Weight

Approx. 700Kg

Power Supply

AC380V, 3P+N+PE, 50Hz, 5kW

Vent Gas

N2, 0.4MPa

Process Gas

Ar, Ar/H2 forming gas, O2, etc., 0.15-0.2MPa

CDA

0.5-0.6MPa


主站蜘蛛池模板: 浮力国孚力国产限制第1 | 欧美日韩高清一区二区三区 | 91在线品视觉盛宴免费 | 日韩精品一区二区三区四区 | 国产成人精品综合网站 | 亚洲国产精品综合久久一线 | 色综合亚洲综合网站综合色 | 亚洲国产精品一区二区第一页 | 夜色快播 | 91短视频版在线观看免费大全 | 高清乱码精品福利在线视频 | 一级毛片免费不卡 | 97视频在线观看视频最新 | 国产亚洲视频在线 | 91香蕉国产亚洲一二三区 | 亚洲国产日韩欧美一区二区三区 | 91九色网址| 成人免费视频一区二区三区 | 日本在线观看中文 | 一级成人生活片免费看 | 男女男精品视频免费观看 | 久久99国产精一区二区三区 | 午夜影院普通用户体验区 | 欧美不卡在线 | 青青在线香蕉国产精品 | 欧美国产亚洲一区二区三区 | 国色天香成人网 | 成人精品视频一区二区三区尤物 | 欧美在线黄色 | 性视频一区 | 激情影院在线视频永久观看 | 青青青青爽极品在线视频 | 日韩一级免费毛片 | 日本xxxwww免费视频 | 国产精品55夜色66夜色 | 亚洲国产欧美91 | jlzz中国jizz日本老师水多 | 精品久久久久亚洲 | 91亚洲国产成人久久精品网站 | 本道久久综合88全国最大色 | 久久久久久毛片免费观看 |